Evaluation of TiO2/ZnO/SnO2 multilayer thin films on Si(100) as triboelectric friction layer

Abstract

This study presents a novel multilayer-semiconductor triboelectric nanogenerator (MLSC-TENG) that enhances charge transfer and initial charge density to overcome the limitations of conventional TENGs by multilayer thin films composed of TiO2, ZnO, and SnO2. The device operates through contact electrification and electrostatic induction, featuring two distinct electrodes. The active negative layer is deposited on Si substrates with an Ag seed layer using magnetron sputtering, employing a PET/ITO counter-electrode. The system attains a maximum power density of 400 mW/m2 with a 100 MΩ load, a short-circuit current of 20 μA at 10 Hz, and an open-circuit voltage of ±55 V. Additionally, it powers 156 LEDs and exhibits an energy storage capacity of 16.9 μJ at 52 μF, highlighting its applicability for wearable electronics. This scalable and cost-effective approach highlights the significant role of semiconductor (SC) band structures in enhancing TENG performance and presents a viable pathway for sustainable energy harvesting. The demonstrated strategy has the potential to meaningfully influence the application of TENGs in energy harvesting systems, providing a cost-effective solution for powering wearable electronics. The study facilitates progress in sustainable energy solutions for future wearable technologies by tackling critical issues in energy conversion efficiency.